For pressure measurement in high-volume devices, pressure dies are an excellent choice because they can be integrated even more efficiently into the available space than packaged sensors. Additionally, manufacturers can control the entire setup, which is crucial for sterile applications in medical technology. To meet these needs, AMSYS offers not only sensors in plastic or ceramic housings, but also pure micro-mechanical silicon-based pressure sensing dies (MEMS).
The SM30F is designed for measuring medium-range relative and differential pressures from under 5 psi to 150 psi (approximately 350 mbar to 10 bar). These chips are available with an open or closed measurement bridge and provide an output signal of 80 mV (30 psi and 150 psi versions) or 90 mV (5, 15, and 80 psi variants).
From a pressure range of 15 psi onwards, these sensing dies exhibit a consistently low non-linearity of typically only ±0.1% of the span on both the front and back sides. This makes the SM30F ideal for back-side pressurization, where the medium comes into contact only with the rear side during relative pressure measurements. Since this side consists solely of silicon, the SM30F pressure sensing die is also well-suited for measuring conductive and mildly corrosive liquids.